マイクロ波放電励起KrFエキシマランプの理論解析

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タイトル別名
  • Theoretical Analysis on a Microwave-Discharge-pumped KrF Excimer lamp
  • マイクロハ ホウデン レイキ KrF エキシマ ランプ ノ リロン カイセキ

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We have first constructed a kinetic numerical model of the microwave-discharge-pumped KrF (B→X) excimer lamp with He and/or Ne buffer systems, so that high-efficiency lamp characteristics obtained experimentally could be theoretically explained in terms of total gas pressure and gas mixture. With this lamp model analysis, it was revealed that high intrinsic efficiency of around 10% is obtainable with He-diluted and Ne-diluted mixtures, that the mean electron energy is 4-6 eV the same as that of the conventional discharge-pumped KrF laser, and then that the dominant channel (>80%) in KrF*formation is the neutral reaction (Kr*+F2). This theoretical analysis also indicated that intrinsic efficiency improvement with two-component buffer gas mixture is due to the increase of KrF* formed via two reaction channels (Kr+F2*, Kr++F-).

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