Micro-Hole Inspection System Using Low-Frequency Sound
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- NAGASU Yoshinori
- 長野県工業技術総合センター
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- NAKAYAMA Noboru
- 信州大学
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- ITOH Kazunori
- 信州大学
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- OTANI Makoto
- 信州大学
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- EGUCHI Kakumasa
- 長野県工業技術総合センター
Bibliographic Information
- Other Title
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- 低周波音響信号利用による微細穴検査技術
- —Effects of Loudspeaker Frequency on Inspection Resolution—
- —検査に使用する周波数と検査分解能の関係—
Abstract
This paper presents a method for non-destructive inspecting micro-holes with diameters of less than 100μm by using audible sound. Fluid flow through micro-holes affects the performance of a product. Therefore, if the flow rate of fluid passing through micro-holes could be accurately assessed by means of an inspection system, it would be possible to guarantee the performance of the product. By using a low frequency sound in micro-hole inspection, it is possible to measure the hole diameter differences of 1μm when hole diameter is 100μm. In addition, the experimental results show that, by setting the appropriate frequency, it is possible to measure faster than conventional inspection method.
Journal
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- Journal of the Japan Society for Precision Engineering
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Journal of the Japan Society for Precision Engineering 80 (11), 1023-1030, 2014
The Japan Society for Precision Engineering
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Keywords
Details
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- CRID
- 1390282679806658048
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- NII Article ID
- 130004706151
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- ISSN
- 1882675X
- 09120289
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- Text Lang
- ja
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- Data Source
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- JaLC
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed