Development of a Method for Multi-Surface Interferometry by a Wavelength Scanning Interferometer

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  • 波長走査干渉計による多面干渉計測手法の開発
  • ハチョウ ソウサ カンショウケイ ニ ヨル タメン カンショウ ケイソク シュホウ ノ カイハツ

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Wavelength scanning interferometry allows the simultaneous measurement of surface shape and optical thickness variation of a transparent object consisting of several parallel surfaces. It is observed that multiple fringe patterns overlap each other in the interference image of such an object. When the wavelength is scanned, the phases of these fringe patterns change with different frequencies. Therefore they can be detected by a phase-shifting technique which is designed for an arbitrary order of harmonic signal. However, the noise caused by signal frequency detuning and other nonlinearities makes it difficult to obtain reliable results. In this paper, a new 2N-1 sample algorithm for the detection of arbitrary order of harmonics is derived. The new algorithm suppresses the effect of signal frequency detuning as well as the multiple-beam interference noise. From the experimental results, it is shown that the new algorithm can measure the object consisting of three reflecting surfaces with an uncertainty λ/10 in a Fizeau interferometer.

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