First principles analysis on proximity gettering sites formed by C<sub>3</sub>H<sub>5</sub> cluster ion implantations
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- shirasawa sho
- Okayama Pref. Univ.
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- Sueoka Koji
- Okayama Pref. Univ.
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- Yamaguchi Tadashi
- Renesas Electronics
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- Maekawa Kazuyoshi
- Renesas Semiconductor Manufacturing
Bibliographic Information
- Other Title
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- C<sub>3</sub>H<sub>5</sub>クラスターイオン注入による近接ゲッタリングサイトに関する第一原理解析
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2015.2 (0), 3283-3283, 2015-08-31
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390577298349613440
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC