Inclination Effects on Voltage-controlled Tuning of MEMS Disk Resonator Array Composite Fabricated by Deep Reactive Ion Etching Process

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Details 詳細情報について

  • CRID
    1390845713025427712
  • DOI
    10.18494/sam.2018.1972
  • ISSN
    24350869
    09144935
  • Text Lang
    en
  • Data Source
    • JaLC
    • Crossref

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