High quality semipolar (10-13) AlN hetero-epitaxial growth by ammonia-free high-temperature MOVPE (AFHT-MOVPE)
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- Shen Xu-Qiang
- AIST
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- Kojima Kazutoshi
- AIST
Bibliographic Information
- Other Title
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- アンモニアフリー高温有機金属気相成長法による高品質(10-13)半極性面AlNヘテロエピタキシャル成長
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2021.1 (0), 2586-2586, 2021-02-26
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390855422518990720
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC