COMPREHENSIVE REVIEW : Revolution of Sensors in Micro-Electromechanical Systems
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説明
<jats:p> Microsensors realized by micro-electromechanical systems (MEMS) technology play a key role as the input devices of systems. In this report, the following sensors are reviewed: piezoresistive and capacitive pressure sensors, surface acoustic wave (SAW) wireless pressure sensors, tactile sensor networks for robots, accelerometers, angular velocity sensors (gyroscopes), range image sensors using optical scanners, infrared imagers, chemical sensing systems as Fourier transform infrared (FTIR) spectroscopy and gas chromatography, flow sensors for fluids, and medical sensors such as ultrafine optical-fiber blood pressure sensors and implantable pressure sensors. </jats:p>
収録刊行物
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- Japanese journal of applied physics : JJAP
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Japanese journal of applied physics : JJAP 51 (8), 080001-, 2012-08
Tokyo : The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1520290883812803328
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- NII論文ID
- 40019395096
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- NII書誌ID
- AA12295836
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- ISSN
- 00214922
- 13474065
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- NDL書誌ID
- 023907318
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- 本文言語コード
- en
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- NDL 雑誌分類
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- ZM35(科学技術--物理学)
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- データソース種別
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- NDL
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