Synergy effect of particle radiation and ultraviolet radiation from capacitively coupled radio frequency argon plasmas on n-GaN etching damage

DOI Web Site Web Site Web Site 15 Citations 7 References

Bibliographic Information

Other Title
  • Synergy effect of particle radiation and ultraviolet radiation from capacitively coupled radio frequency argon plasmas on n GaN etching damage
  • Special issue: Dry process
  • Special issue Dry process

Search this article

Description

コレクション : 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌

Journal

Citations (15)*help

See more

References(7)*help

See more

Keywords

Details 詳細情報について

Report a problem

Back to top