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[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research
Effect of Surface Treatments after HF Etching on Oxidation of Si
1 Citations
EGAWA M.
Faculty of Science and Technology, Science University of Tokyo
IKOMA Hideaki
Faculty of Science and Technology, Science University of Tokyo
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Jpn. J. Appl. Phys.
Jpn. J. Appl. Phys. 33 943-, 1994
The Japan Society of Applied Physics
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Keywords
silicon
surface treatments
oxidation
X-ray photoelectron spectroscopy
oxidation kinetics
deionjzed water
OH group
dissolved oxygen
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1570009752456022016
NII Article ID
110003902954
NII Book ID
AA10457675
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en
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