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Contouring of polished single-crystal silicon plates by wire electrical discharge machining
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- TAKINO Hideo
- Nikon Corporation
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- ICHINOHE Toshimitsu
- Nikon Corporation
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- TANIMOTO Katsunori
- Nikon Corporation
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- NOMURA Kazushi
- Nikon Corporation
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- KUNIEDA Masanori
- Tokyo University of Agriculture & Technology
Search this article
Journal
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- Precision engineering
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Precision engineering 31 (4), 358-363, 2007-10-01
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Keywords
Details 詳細情報について
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- CRID
- 1570291225512166656
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- NII Article ID
- 10019852944
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- NII Book ID
- AA11537543
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- ISSN
- 01416359
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- Text Lang
- en
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- Data Source
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- CiNii Articles
