Control of Reaction Mechanism of Photochemical Vapor Deposition of Aluminum Film by Timing of Source Introduction
-
- Sahara Kouji
- Department of Electrical and Electronic Engineering, Toyohashi University of Technology
-
- Ouchi Hideki
- Department of Electrical and Electronic Engineering, Toyohashi University of Technology
-
- Hanabusa Mitsugu
- Department of Electrical and Electronic Engineering, Toyohashi University of Technology
説明
In photochemical vapor deposition of aluminum film using dimethyaluminum hydride (DMAH) under illumination of a deuterium lamp, a photolytic reaction became dominant when silicon wafer was exposed to DMAH at room temperature prior to substrate heating to 230°C for deposition, while only a pyrolytic reaction took place when DMAH was introduced after the substrate was heated to 230°C. A scanning tunneling microscope study showed formation of Al islands in high density with the DMAH exposure, while well-isolated islands were revealed without the initial exposure. Activation sites created by chemisorption may be responsible for the observed effects.
収録刊行物
-
- Japanese Journal of Applied Physics
-
Japanese Journal of Applied Physics 30 (7), 1545-1548, 1991
公益社団法人 応用物理学会
- Tweet
キーワード
詳細情報 詳細情報について
-
- CRID
- 1572543028050847488
-
- NII論文ID
- 130003471025
-
- ISSN
- 00214922
-
- 本文言語コード
- en
-
- データソース種別
-
- CiNii Articles