Impact of Gate Etch Damage and Profile in High Density DRAM Cell
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- KIM Il-Gweon
- TG4-P9, Memory R&D Division, Hynix Semiconductor Inc.
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- BAE Jung-wan
- TG4-P9, Memory R&D Division, Hynix Semiconductor Inc.
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- CHOY Jun-Ho
- TG4-P9, Memory R&D Division, Hynix Semiconductor Inc.
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- KIM Nam-Sung
- TG4-P9, Memory R&D Division, Hynix Semiconductor Inc.
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- KWEON Young-Woo
- TG4-P9, Memory R&D Division, Hynix Semiconductor Inc.
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- CHOI Se-Kyoung
- TG4-P9, Memory R&D Division, Hynix Semiconductor Inc.
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- KIM Sung-Chul
- TG4-P9, Memory R&D Division, Hynix Semiconductor Inc.
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- PARK Joo-Seog
- TG4-P9, Memory R&D Division, Hynix Semiconductor Inc.
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- KIM Ji-Byum
- TG4-P9, Memory R&D Division, Hynix Semiconductor Inc.
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- Extended abstracts of the ... Conference on Solid State Devices and Materials
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Extended abstracts of the ... Conference on Solid State Devices and Materials 2001 26-27, 2001-09-25
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- CRID
- 1573105974999576192
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- NII論文ID
- 10015752170
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- NII書誌ID
- AA10777858
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