Effects of Floating Gate Structure on Reliability in Flash Memories

Bibliographic Information

Other Title
  • フラッシュメモリ信頼性におけるフローティングゲート形状の影響

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Description

Floating gate structure of flash memory cell is discussed for contactless array memory with high reliability and low power consumption.It is found that bird's beak under the floating gate strongly affects the endurance and disturb characteristics of memory cell.High reliability is obtained with bird-beak-free memory cells by using nitride film beside the floating gate.

Journal

  • Technical report of IEICE. SDM

    Technical report of IEICE. SDM 94 (407), 41-46, 1994-12-16

    The Institute of Electronics, Information and Communication Engineers

Keywords

Details 詳細情報について

  • CRID
    1573105977274320640
  • NII Article ID
    110003310326
  • NII Book ID
    AN10013254
  • Text Lang
    ja
  • Data Source
    • CiNii Articles

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