Diffusion Barrier Characteristics of TiSix/TiN for Tungsten Dual Poly Gate in DRAM

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Details 詳細情報について

  • CRID
    1574231875369564032
  • NII Article ID
    10022544580
  • NII Book ID
    AA10777858
  • Text Lang
    en
  • Data Source
    • CiNii Articles

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