Spatial profile of neutral free radical beam produced by the method of phot-deionization of negative ion beams
説明
We have been developing a trial surface processing apparatus utilizing a steady-flux refined beam of neutral free radicals (RBNR) produced by the PDINIB (photo-deionization of negative ion beams) method. We could improve the S/N ratio and the spatial resolution of the DNIC (decreasing negative ion beam current) measurement system 40 times and 7 times, respectively. This improved monitoring system is used for measurement of the spatial profile of the neutral-beam flux under various conditions of the neutral-beam productions.
収録刊行物
-
- Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference
-
Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference 272-273, 2004-05-13
Japan Soc. of Appl. Phys